| TEL |
|
|
|
|
|
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
|
| 1810-221329-12 |
Shield Ring T7 |
TF-QZ-6029 |
6" |
Quartz |
Etch |
|
| 1810-322774-12 |
Shield Ring With Screw |
TF-QZ-6030 |
6" |
Quartz |
Etch |
|
| 1D05-300052-13 |
Insulator Ring A7 |
TF-QZ-6031 |
6" |
Quartz |
Etch |
|
|
|
|
|
|
|
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
|
| 1805-220135-13 |
Ring ext outer |
TF-CQ-8231 |
8" |
SCCM |
|
|
| 1805-220177-11 |
Shield Ring |
TF-CQ-8232 |
8" |
SCCM |
|
|
| 1805-220177-22 |
Shield Ring |
TF-CQ-8233 |
8" |
|
Etch |
|
| 1805-320102-12 |
cover ring |
TF-CQ-8234 |
8" |
SCCM |
Oxide |
|
| 1805-320109-13 |
Cover Ring Outer |
TF-CQ-8235 |
8" |
SCCM |
|
|
| 1805-320110-21 |
Inner ring |
TF-CQ-8236 |
8" |
SCCM |
|
|
| 1805-320125-21 |
Cover Ring Inner |
TF-CQ-8237 |
8" |
|
Etch |
|
| 1805-320126-21 |
Cover Ring Outer |
TF-CQ-8238 |
8" |
|
Etch |
|
| 1805-320139-11 |
Base Ring |
TF-CQ-8239 |
8" |
SCCM |
|
|
| 1810-121923-11 |
Upper Electrode |
TF-CQ-8240 |
8" |
SCCM |
|
|
| 1810-221329-12 |
Shield Ring |
TF-CQ-8241 |
8" |
|
Etch |
|
| 1810-222433-11 |
Ring inner |
TF-CQ-8242 |
8" |
DP |
|
|
| 1810-223624-11 |
Ring Posistion Shelter |
TF-CQ-8243 |
8" |
DP |
|
|
| 1810-225123-11 |
Focus Ring |
TF-CQ-8244 |
8" |
|
Etch |
|
| 1810-322774-12 |
Shield Ring |
TF-CQ-8245 |
8" |
|
Etch |
|
| 1810-329156-11 |
Focus ring |
TF-CQ-8246 |
8" |
SCCM |
|
|
| 1D05-200020-11 |
DEPO SHIELD QU-A-3 |
TF-CQ-8247 |
8" |
88 SCCM |
|
|
| 1D05-200031-11 |
COVER BAFFLE Q-L3(DRM2) |
TF-CQ-8248 |
8" |
88 SCCM |
|
|
| 1D05-200033-11 |
SUPPORT SHIELD DEPO Q-S5 |
TF-CQ-8249 |
8" |
88 SCCM |
|
|
| 1D05-300040-13 |
Ring Insulator C |
TF-CQ-8250 |
8" |
DRM2 |
|
|
| 1D05-300052-13 |
Ring Insulator A7 |
TF-CQ-8251 |
8" |
DRM2 |
|
|
| 1D05-300053-14 |
Ring Insulator B2 |
TF-CQ-8252 |
8" |
DRM2 |
|
|
| 1D05-300067-13 |
PLATE UPPER Q |
TF-CQ-8253 |
8" |
88 SCCM |
|
|
| 1D05-300133-11 |
RING INSULATOR LA6.0 |
TF-CQ-8254 |
8" |
88 SCCM |
|
|
| 1D05-300162-11 |
Focus Ring |
TF-CQ-8255 |
8" |
|
Etch |
|
| 1D05-300296-11 |
RING F-8SO-Q-260-6H |
TF-CQ-8256 |
8" |
88 SCCM |
|
|
| 1D10-200921-12 |
Ring Depo. Shield P1 |
TF-CQ-8257 |
8" |
DP |
|
|
| 1D10-302209-14 |
Focus Ring (Round) |
TF-CQ-8258 |
8" |
DRM2 |
|
|
| 1D10-304010-12 |
Ring Shield B3 |
TF-CQ-8259 |
8" |
DRM2 |
|
|
| 1D10-309823-11 |
Ceramic Ring A8 |
TF-CQ-8260 |
8" |
DRM2 |
|
|
| 1D10-309946-11 |
Focus Ring (inside step polish) |
|
8" |
DRM2 |
|
|
| 1D10-309946-12 |
Focus Ring (inside step no polish) |
TF-CQ-8262 |
8" |
DRM2 |
|
|
| BB10-300023-13 |
Shield Plate Quartz Window |
TF-CQ-8263 |
8" |
|
CVD |
|
| BB10-306339-11 |
Shield Plate Quartz Window |
TF-CQ-8264 |
8" |
|
CVD |
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
Material |
| 3D05-200094-12 |
Ring Shield Upper |
TF-CQS-60100 |
12" |
Endura |
Etch |
Quartz |
| 3D05-200114-11 |
Upper PLQZ(40) 150DEG |
TF-CQS-60101 |
12" |
|
Etch |
Quartz |
| 3D05-200133-12 |
Focus Ring , T8 3P 310 |
TF-CQS-60102 |
12" |
|
Etch |
Quartz |
| 3D05-300067-11 |
Insulator ESC |
TF-CQS-60103 |
12" |
|
Etch |
Quartz |
| 3D05-300142-13 |
Insulator ESC |
TF-CQS-60104 |
12" |
|
Etch |
Quartz |
| 3D05-300243-11 |
Cover Ring |
TF-CQS-60105 |
12" |
|
Etch |
Quartz |
| 3D10-201093-12 |
Main Front , GND-B |
TF-CQS-60106 |
12" |
|
Etch |
Quartz |
| 3D10-201094-13 |
Main LH , GND-B |
TF-CQS-60107 |
12" |
|
Etch |
Quartz |
| 3D10-201095-13 |
Main RH , GND-B |
TF-CQS-60108 |
12" |
|
Etch |
Quartz |
| 3D10-201448-13 |
Focus Ring |
TF-CQS-60109 |
12" |
|
Etch |
Silicone |
| 3D10-202489-11 |
Focus Ring |
TF-CQS-60110 |
12" |
|
Etch |
Silicone |
| 3D10-404215-11 |
Ring Back up |
TF-CQS-60111 |
12" |
|
Etch |
Quartz |
| 3D87-003411-13 |
CEL BODY ASSY |
TF-CQS-60112 |
12" |
|
Etch |
Silicone |
| 3D87-050378-11 |
ESC ASSY , HT, DT |
TF-CQS-60113 |
12" |
|
Etch |
Silicone |
| 3D87-052667-11 |
CEL BODY ASSY |
TF-CQS-60114 |
12" |
|
Etch |
Silicone |