| Novellus |
|
|
|
|
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
|
Insulator,Gas Feedthru,Ceramic |
TF-CE-6001 |
6" |
Novellus Concept 1 |
|
| 15-00484-00 |
Ring,Heater Centering,Ceramic |
TF-CE-6002 |
6" |
Novellus Concept 1 |
|
| 15-00567-00 |
Tube,Tc,1/8"ID,Ceramic |
TF-CE-6003 |
6" |
Novellus Concept 1 |
|
| 15-00699-01 |
Fork,Finger,150mm |
TF-CE-6004 |
6" |
Novellus Concept 1 |
|
| 15-00742-00 |
Tube,Tc,Ceramic |
TF-CE-6005 |
6" |
Novellus Concept 1 |
|
| 15-00866-00 |
SPRING,CERAMIC PED.,WCVD |
TF-CE-6006 |
6" |
Novellus Concept 1 |
|
| 15-032014-00 |
Quad Power Supply |
TF-QZ-6015 |
6" |
Novellus Concept 1 |
|
| 15-11606-00 |
Insulator,Gas Distribution,Ceramic |
TF-CE-6007 |
6" |
Novellus Concept 1 |
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
| 15-032939-00 |
Exclusion Ring |
TF-CQ-8265 |
8" |
|
|
| 15-032502-00 |
Alumina Pin |
TF-CQ-8266 |
8" |
|
|
| 15-034333-00 |
4-Inch Process Tube |
TF-CQ-8267 |
8" |
|
|
| 15-053394-02 |
Dimple fork |
TF-CQ-8268 |
8" |
|
|
| 15-052619-00 |
Alox Fork |
TF-CQ-8269 |
8" |
|
|
| 15-054434-01 |
Exclusion ring 3.00mm |
TF-CQ-8270 |
8" |
|
|
| 15-054434-02 |
Exclusion ring 2.75mm |
TF-CQ-8271 |
8" |
|
|
| 15-054434-03 rev A |
Exclusion ring 2.50mm |
TF-CQ-8272 |
8" |
|
|
| 15-032939-00 |
Exclusion ring |
TF-CQ-8273 |
8" |
|
|
| 15-032939-00 rev D |
Exclusion ring 2.25mm |
TF-CQ-8274 |
8" |
|
|
| 15-053394-02 |
Minimum Contact Area Fork |
TF-CQ-8275 |
8" |
|
|
| 15-156718-00 |
Exclusion ring 1.00mm |
TF-CQ-8276 |
8" |
|
|
| 15-00567-00 |
TUBE, GAS FEED |
TF-CQ-8277 |
8" |
|
|
| 15-00699-02 |
FINGER FORK |
TF-CQ-8278 |
8" |
|
|
| 15-032014-00 |
WINDOW |
TF-CQ-8279 |
8" |
|
|
| 15-00483-00 |
RING, HEATER TUBE |
TF-CQ-8280 |
8" |
|
|
| 15-00731-00 |
BUSHING |
TF-CQ-8281 |
8" |
|
|
| 15-00484-00 |
RING, HEATER CENTERING |
TF-CQ-8282 |
8" |
|
|
| 20-00153-00 |
BALL, HEATER SUPPORT |
TF-CQ-8283 |
8" |
|
|