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LAM

 　 　 　
OEM P/N Description TF P/N wafer Chamber Process
716-011009-001 quartz window TF-QZ-6026 6" Rainbow4500 　
716-011543-001 Clamp attachment plate TF-CQ-6038 6" Rainbow4400 　
716-011563-161 plate wafer clamp TF-CQ-6039 6" Rainbow4500 　
716-011570-001 ring filler orifice TF-CQ-6040 6" Rainbow4400 　
716-011651-006 edge ring TF-CQ-6041 6" TCP9600 　
716-011830-006 focus ring TF-CQ-6042 6" Rainbow4400 　
716-011830-006 focus ring TF-CQ-6043 6" TCP9600 　
716-011922-001 ring. Electrode clamp TF-CQ-6044 6" Rainbow4500 　
716-011923-001 Plate , W/C 6", DMD, 1.5mm CVW/Pin TF-CQ-6045 6" 　 　
716-020904-016 edge ring focus lwr wfr clamp TF-CQ-6046 6" Rainbow4500 　
716-020905-001 ring, filler, lwr wafer clamp TF-CQ-6047 6" Rainbow4500 　
716-028123-002 filler ring TF-CQ-6048 6" Rainbow4500 　
716-028454-012 Disk TF-QZ-6027 6" Quartz Etch
716-030136-001 Focus Ring TF-QZ-6028 6" Ceramic Etch
716-031453-001 Ring,Fillier,Lower Chamber TF-CE-6011 6" 　 　
716-250514-001 Clamp , Shadow TF-CQ-6049 6" Ceramic Etch
716-330121-001 upper ceramic shaped window TF-CE-6012 6" TCP9600 　
716-330121-004 upper ceramic shaped window TF-CE-6013 6" TCP9600 　
716-330121-006 upper ceramic shaped window TF-CE-6014 6" TCP9600 　
716-330162-002 filler ring TF-CQ-6050 6" TCP9600 　
716-330167-161 plate wafer clamp TF-CQ-6051 6" TCP9600 　
716-330167-261 plate wafer clamp TF-CQ-6052 6" TCP9600 　
716-330504-061 Ring,FOC 6",ESC,GD Ring TF-CQ-6053 6" 　 　
716-330504-061 ring FOC GD ring Jeida ESC TF-CQ-6054 6" 　 　
716-330504-064 Ring,FOC 6",ESC,GD Ring TF-CQ-6055 6" 　 　
OEM P/N Description TF P/N wafer Chamber Process
716-007136-002 RING, QURTZ, UPPER, HPT TF-CQ-8180 8" HPT 　
716-008645-001 Degrease Sp Insp TF-CQ-8181 8" HPT 　
716-011009-001 Window Quartz (The Left Side) TF-CQ-8182 8" 　 　
716-011493-001 SPACER Q'TZ MODULE  TF-CQ-8183 8" 　 　
716-011543-001 Attachment Ring TF-CQ-8184 8" 　 　
716-011570-001 Filler Orifice W/C Ceramic TF-CQ-8185 8" 　 　
716-011651-008 Edge Ring TF-CQ-8186 8" 　 　
716-011763-008 Edge Ring TF-CQ-8187 8" 　 　
716-011830-008 Focus Ring TF-CQ-8188 8" 　 　
716-0163394-001 Ring Confinment TF-CQ-8189 8" HPT 　
716-021323-001 Funnel Stripper TF-CQ-8190 8" 　 　
716-028454-012 Quartz Ring Plate TF-CQ-8191 8" 　 　
716-030135-001 Edge Ring TF-CQ-8192 8" 　 　
716-031052-001 Window Quartz TF-CQ-8193 8" 　 　
716-140139-211 Hot Edge ring  TF-CQ-8195 8" 　 　
716-140236-003 CONFINEMENT RING TF-CQ-8196 8" 　 　
716-140432-002 UPPER KEYED RING TF-CQ-8197 8" 　 　
716-140469-002 Coupling ring
TF-CQ-8198
8" exelan 　
716-330045-004 R, Edge 8" NCH, SHDW R, ESC TF-CQ-8199 8" 　 　
716-330045-281 Ring Edge Ceramic NON-LANDED A96 TF-CQ-8200 8" 96PTX 　
716-330121-001 Upper Shield Windows TF-CQ-8201 8" 　 　
716-330121-211 Upper Ceramic Shaped Window TF-CQ-8202 8" 　 　
716-330162-002 Filler Ring TF-CQ-8203 8" 　 　
716-330355-001 WINDOW QUARTZ (TCP 96) TF-CQ-8204 8" 　 　
716-330504-081 Focus Ring TF-CQ-8205 8" 　 　
716-330891-002 Top Disk Quartz TF-CQ-8206 8" 　 　
716-330892-007 Gas Distribution Plate TF-CQ-8207 8" 96PTX 　
716-330915-001 Gas Ring Insert TF-CQ-8209 8" 96PTX 　
716-331051-002 Ring Uniformity Cut-Out AS Fired-Rough TF-CQ-8210 8" 　 　
716-331051-006 Uniformity Ring TF-CQ-8211 8" 96PTX 　
716-331088-001 Edge Ring, Quartz for WAC TF-CQ-8212 8" 　 　
716-331089-001 Ring Edge 8" Bot Cera TF-CQ-8213 8" 　 　
716-441044-007 Strip Chamber Baffle TF-CQ-8214 8" 　 　
716-443086-401 Hot Edge ring ,EXELAN TF-CQ-8215 8" exelan 　
716-443090-010 Ring Qtz upper TF-CQ-8216 8" exelan 　
716-443189-002 Ring focus upper Qtz TF-CQ-8218 8" exelan 　
716-443230-002 Ring, confinement TF-CQ-8219 8" exelan 　
716-443234-002 Ring Focus Qtz TF-CQ-8220 8" exelan 　
716-460215-002 Ring Focus STP CHM TF-CQ-8221 8" 　 　
716-460785-007 GDP TF-CQ-8222 8" 　 　
716-460875-002 INSUL, LWR ELTD, STP Chamber TF-CQ-8223 8" 　 　
716-460915-001 Focus Ring  TF-CQ-8224 8" 　 　
716-460916-001 INNER RING  TF-CQ-8226 8" 　 　
716-460916-002 OUTER RING TF-CQ-8227 8" 　 　
716-460957-002 Focus Ring  TF-CQ-8228 8" 　 　
839-011907-111 Electrode, silicon, 8" SM,Hole, LR TF-CQ-8229 8" exelan 　
839-443215-101 Upper Electrode TF-CQ-8230 8" exelan 　
OEM P/N Description TF P/N wafer Chamber Process Material
716-003543-001 Hot Edge Ring TF-CQS-45100 12" 　 Etch Silicone
716-003543-006 Hot Edge Ring TF-CQS-45101 12" 　 Etch Silicone
716-011969-002 Ring Top ADJ TF-CQS-45102 12" 　 Etch Quartz
716-012639-024 NOZ , INJ , 8X TF-CQS-45103 12" 　 Etch Quartz
716-012640-011 Disk TF-CQS-45104 12" 　 Etch Quartz
716-012640-012 WDO , GAS , INJ TF-CQS-45105 12" 　 Etch Quartz
716-013325-005 Hot Edge Ring TF-CQS-45106 12" 　 Etch Silicone
716-013344-001 Cover Ring Outer TF-CQS-45107 12" 　 Etch Quartz
716-013402-003 Ring , COV TF-CQS-45108 12" 　 Etch Quartz
716-013402-008 Edge Ring Cover TF-CQS-45109 12" 　 Etch Quartz
716-014843-001 Ring , WAP, DFC3 TF-CQS-45110 12" 　 Etch Quartz
716-014843-300 Ring , WAP , DFC TF-CQS-45111 12" 　 Etch Quartz
716-014843-303 Ring , WAP TF-CQS-45112 12" 　 Etch Quartz
716-017112-002 Ring WAP Twist Top TF-CQS-45113 12" 　 Etch Quartz
716-017112-300 Ring WAP AN SLT TF-CQS-45114 12" 　 Etch Quartz
716-017112-330 Ring WAP THK TF-CQS-45115 12" 　 Etch Quartz
716-018468-092 Outer Ground Ring TF-CQS-45116 12" 　 Etch Quartz
716-023013-004 Hot Edge Ring TF-CQS-45117 12" 　 Etch Silicone
716-023013-007 Hot Edge Ring TF-CQS-45118 12" 　 Etch Silicone
716-026652-902 Ring Edge BOT TF-CQS-45119 12" 　 Etch Quartz
716-031257-531 Ring Edge Top TF-CQS-45120 12" 　 Etch Quartz
716-331142-305 Top Edge Ring TF-CQS-45121 12" 　 Etch Quartz
716-803156-004 B, Focus ,R ,CVR TF-CQS-45122 12" 　 Etch Quartz
839-020965-005 ASSY , ELCTD , Outer TF-CQS-45123 12" 　 Etch Silicone
839-021113-002 ASSY , ELCTD , Inner TF-CQS-45124 12" 　 Etch Silicone

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