| AMAT |
|
|
|
|
|
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
|
| 0020-09035 |
Pin Wafer Lift 6" |
TF-CE-6008 |
6" |
|
|
|
| 0200-09002 |
View Port |
TF-QZ-6016 |
6" |
|
Etch |
|
| 0200-09021 |
Shield ceramic150mm |
TF-CQ-6032 |
6" |
|
|
|
| 0200-09158 |
Heater Window |
TF-QZ-6017 |
6" |
|
Etch |
|
| 0200-09626 |
collar SI OX/MLR/NIT 150mm flat |
TF-CQ-6033 |
6" |
|
|
|
| 0200-09636 |
DC-Plug |
TF-CQ-6034 |
6" |
|
Etch |
|
| 0200-09670 |
ring, clamp, cer, flat, Al 150mm |
TF-CQ-6035 |
6" |
|
|
|
| 0200-09735 |
Cover Clamp Ring |
TF-CE-6009 |
6" |
|
Etch |
|
| 0200-09757 |
ring, clamp, flat, Al 150mm, 95HT finger |
TF-CQ-6036 |
6" |
|
|
|
| 0200-09759 |
Shield Ring |
TF-CE-6010 |
6" |
|
Etch |
|
| 0200-09782 |
Pipe Insulating |
TF-QZ-6018 |
6" |
|
Etch |
|
| 0200-09850 |
insert ring 150mm |
TF-CQ-6037 |
6" |
|
|
|
| 0200-10073 |
Insulator |
TF-QZ-6019 |
6" |
|
Etch |
|
| 0200-10243 |
Shadow Ring |
TF-QZ-6020 |
6" |
|
Etch |
|
| 0200-10246 |
Uni-Insert GDP |
TF-QZ-6021 |
6" |
|
Etch |
|
| 0200-20060 |
insulator |
TF-QZ-6022 |
6" |
|
|
|
| 0200-35623 |
Insert Ring |
TF-CQ-6056 |
6" |
|
Etch |
|
| 0200-36680 |
Upper Quartz Liner |
TF-QZ-6023 |
6" |
|
Etch |
|
| 0200-39347 |
Shadow Ring |
TF-QZ-6024 |
6" |
|
Etch |
|
| 0200-76068 |
Shadow Ring |
TF-QZ-6025 |
6" |
|
Etch |
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
|
| 0020-20114 |
Isolator DC Bias |
TF-CQ-8001 |
8" |
Endura |
|
|
| 0020-20126 |
Standoff |
TF-CQ-8002 |
8" |
Endura |
|
|
| 0020-21664 |
Isolator Adapt / Insulator Source 13" |
TF-CQ-8003 |
8" |
Endura |
TIN |
|
| 0020-22975 |
Insulator TiN 8" Preclean |
TF-CQ-8004 |
8" |
Endura |
WxZ |
|
| 0020-24018 |
Mono Si Attena |
TF-CQ-8005 |
8" |
Endura |
Preclean |
|
| 0020-25917 |
Insulator |
TF-CQ-8006 |
8" |
|
|
|
| 0020-28907 |
Isolator |
TF-CQ-8007 |
8" |
|
|
|
| 0040-21178 |
Bell Jar |
TF-CQ-8009 |
8" |
Endura |
Preclean |
|
| 0200-00137 |
Focus Ring |
TF-CQ-8010 |
8" |
DPS |
METAL |
|
| 0200-00149 |
Plasma Tube |
TF-CQ-8011 |
8" |
|
Etch |
|
| 0200-00218 |
Cover Top Quartz |
TF-CQ-8012 |
8" |
Endura |
Preclean |
|
| 0200-00221 |
Quartz Insulator |
TF-CQ-8017 |
8" |
Endura |
Preclean |
|
| 0200-00234 |
Lid Isolator |
TF-CQ-8021 |
8" |
|
|
|
| 0200-00247 |
Capture Ring |
TF-CQ-8022 |
8" |
DPS |
Metal |
|
| 0200-00299 |
Insulator coil support |
TF-CQ-8023 |
8" |
Endura |
IMP |
|
| 0200-00316 |
Isolator Pumping Ring,Middle,200mm Producer |
TF-CQ-8024 |
8" |
Producer |
|
|
| 0200-00317 |
Isolator Pumping Ring |
TF-CQ-8025 |
8" |
Producer |
|
|
| 0200-00332 |
Qtz single ring |
TF-CQ-8026 |
8" |
DPS |
poly |
|
| 0200-00353 |
Pin Ceramic |
TF-CQ-8027 |
8" |
WxZ |
|
|
| 0200-00354 |
Purge Ring |
TF-CQ-8028 |
8" |
Endura |
WxZ |
|
| 0200-00402 |
Isolator Pumping Ring, TOP,200mm |
TF-CQ-8029 |
8" |
Producer |
|
|
| 0200-00406 |
Bushing |
TF-CQ-8030 |
8" |
|
Thin Film |
|
| 0200-00410 |
GDP |
TF-CQ-8032 |
8" |
Super E |
Etch |
|
| 0200-00602 |
Single Ring |
TF-CQ-8033 |
8" |
|
Etch |
|
| 0200-00622 |
Outer Ring |
TF-CQ-8034 |
8" |
Endura |
WxZ |
|
| 0200-00624 |
Purge Ring |
TF-CQ-8035 |
8" |
Endura |
WxZ |
|
| 0200-00632 |
Shadow Ring |
TF-CQ-8036 |
8" |
Endura |
WxZ |
|
| 0200-00639 |
Insert Ring |
TF-CQ-8037 |
8" |
Emax |
|
|
| 0200-00690 |
Lid Liner |
TF-CQ-8038 |
8" |
|
|
|
| 0200-00796 |
Lift Pin , φ.139 |
TF-CQ-8039 |
8" |
|
Thin Film |
|
| 0200-00849 |
Shandow Ring |
TF-CQ-8040 |
8" |
Emax |
|
|
| 0200-00863 |
Insulator |
TF-CQ-8041 |
8" |
DT Heart |
|
|
| 0200-00902 |
Insulator |
TF-CQ-8042 |
8" |
|
Thin Film |
|
| 0200-00925 |
Top Cover Ring |
TF-CQ-8043 |
8" |
Emax |
|
|
| 0200-01119 |
Shadow ring |
TF-CQ-8044 |
8" |
Super E |
oxide |
|
| 0200-01216 |
Shadow Ring |
TF-CQ-8045 |
8" |
Super E |
|
|
| 0200-01463 |
Shandow Ring |
TF-CQ-8047 |
8" |
Emax |
|
|
| 0200-01509 |
N.M insert ring |
TF-CQ-8048 |
8" |
|
|
|
| 0200-01511 |
Top ring |
TF-CQ-8049 |
8" |
Super E |
oxide |
|
| 0200-01612 |
injector |
TF-CQ-8050 |
8" |
Emax |
|
|
| 0200-01622 |
Wide dimple cover plate |
TF-CQ-8051 |
8" |
DxZ |
all |
|
| 0200-01798 |
LIFT PIN |
TF-CQ-8052 |
8" |
Endura |
|
|
| 0200-01820 |
Insert Ring |
TF-CQ-8053 |
8" |
Emax |
|
|
| 0200-01992 |
Shandow Ring |
TF-CQ-8054 |
8" |
DT Heart |
|
|
| 0200-02041 |
sample |
TF-CQ-8055 |
8" |
|
|
|
| 0200-02124 |
L-shape Cover Ring 63RA,200mm eMAX |
TF-CQ-8056 |
8" |
Emax |
|
|
| 0200-02385 |
Insert ring,NM, l SHAPE 1.5MM NOTCH, EMAX |
TF-CQ-8057 |
8" |
Emax |
|
|
| 0200-02619 |
Top Cover Ring |
TF-CQ-8058 |
8" |
Emax |
|
|
| 0200-02916 |
Depo Ring |
TF-CQ-8059 |
8" |
|
Thin Film |
|
| 0200-09071 |
Lift Pin 200mm |
TF-CQ-8060 |
8" |
P5000 |
|
|
| 0200-09072 |
CERAMIC SHIELD, 200MM |
TF-CQ-8061 |
8" |
Endura |
WxZ |
|
| 0200-09074 |
WSI(SL) Window |
TF-CQ-8062 |
8" |
P5000 |
|
|
| 0200-09129 |
Isolator |
TF-CQ-8063 |
8" |
Endura |
WxZ |
|
| 0200-09147 |
Pin Wafer Lift |
TF-CQ-8064 |
8" |
|
|
|
| 0200-09158 |
Window Heater CVD chamber |
TF-CQ-8065 |
8" |
|
|
|
| 0200-09201 |
LOWER G.D.P |
TF-CQ-8066 |
8" |
DPS |
ASP |
|
| 0200-09319 |
Out Shadow Ring |
TF-CQ-8067 |
8" |
|
|
|
| 0200-09444 |
Cap Top |
TF-CQ-8068 |
8" |
|
Etch |
|
| 0200-09450 |
Gas Feed Tube |
TF-CQ-8069 |
8" |
Endura |
|
|
| 0200-09478 |
Plate, Gas Distribution, Upper, 200mm, ASP, Prsp3 |
TF-CQ-8070 |
8" |
DPS |
ASP |
|
| 0200-09603 |
Insulating Pipe |
|
8" |
|
|
|
| 0200-09605 |
Plug BIAS Quartz ESC |
TF-CQ-8072 |
8" |
MxP+ |
|
|
| 0200-09606 |
Cover 200mm |
TF-CQ-8073 |
8" |
|
|
|
| 0200-09657 |
Recessed Window |
TF-CQ-8074 |
8" |
|
Etch |
|
| 0200-09716 |
Pin Lift Heater WxZ |
TF-CQ-8075 |
8" |
Endura |
WxZ |
|
| 0200-09782 |
Insulating Pipe |
TF-CQ-8077 |
8" |
|
Etch |
|
| 0200-09785 |
Cap Quartz |
TF-CQ-8078 |
8" |
|
Etch |
|
| 0200-09787 |
Focus Ring |
TF-CQ-8080 |
8" |
MxP |
|
|
| 0200-09850 |
Ring Insert |
TF-CQ-8081 |
8" |
|
|
|
| 0200-09911 |
Cover Ring |
TF-CQ-8082 |
8" |
|
|
|
| 0200-09955 |
Window Front AlN |
TF-CQ-8083 |
8" |
|
|
|
| 0200-09974 |
Pumping Insert Ceramic |
TF-CQ-8084 |
8" |
DxZ |
TEOS |
|
| 0200-10073 |
Insulating Pipe |
TF-CQ-8085 |
8" |
|
Etch |
|
| 0200-10133 |
Endpoint Widow |
TF-CQ-8086 |
8" |
MxP+ |
|
|
| 0200-10143 |
Chamber Insert Ceramic |
TF-CQ-8087 |
8" |
DxZ |
Silane/TEOS |
|
| 0200-10144 |
Isolator Ring Ceramic |
TF-CQ-8088 |
8" |
DxZ |
TEOS/SABP |
|
| 0200-10157 |
Liner Junction SiN DxZ |
TF-CQ-8089 |
8" |
DxZ |
Silane |
|
| 0200-10158 |
Sleeve Junction |
TF-CQ-8090 |
8" |
DxZ |
Silane |
|
| 0200-10160 |
Liner Ceramic DxZ |
TF-CQ-8091 |
8" |
DxZ |
Silane |
|
| 0200-10163 |
Isolator |
TF-CQ-8092 |
8" |
DxZ |
Silane |
|
| 0200-10164 |
Pumping Insert Ceramic |
TF-CQ-8093 |
8" |
DxZ |
Silane |
|
| 0200-10169 |
Edge Ring Ceramic Lock Down |
TF-CQ-8094 |
8" |
DxZ |
All |
|
| 0200-10176 |
Shadow Ring |
TF-CQ-8095 |
8" |
MxP+ |
|
|
| 0200-10243 |
Shadow Ring |
TF-CQ-8097 |
8" |
|
Etch |
|
| 0200-10246 |
Quartz G.D.P. |
TF-CQ-8098 |
8" |
MxP+/eMxP |
|
|
| 0200-10284 |
Lift Pin Ceramic |
TF-CQ-8099 |
8" |
DxZ |
ALL |
|
| 0200-10324 |
Dome |
TF-CQ-8100 |
8" |
DPS |
METAL |
|
| 0200-10377 |
Single Ring Ceramic Poly |
TF-CQ-8101 |
8" |
DPS |
POLY |
|
| 0200-10378 |
Single Ring Ceramic |
TF-CQ-8102 |
8" |
DPS |
Poly |
|
| 0200-10445 |
Shadow Ring |
TF-CQ-8103 |
8" |
eMxP |
|
|
| 0200-10446 |
Insert Ring |
|
8" |
Super E |
|
|
| 0200-18053 |
Guide lift pin |
TF-CQ-8107 |
8" |
HDP |
|
|
| 0200-18062 |
Dome 14 ID HDPCVD |
TF-CQ-8108 |
8" |
HDP |
|
|
| 0200-18078 |
Collar,200mm SNNF Ultima |
TF-CQ-8109 |
8" |
HDP |
|
|
| 0200-18081 |
COVER LOW PROFILE HDP-CVD, ULT |
TF-CQ-8110 |
8" |
HDP |
|
|
| 0200-18082 |
Central Nozzle |
TF-CQ-8111 |
8" |
HDP |
|
|
| 0200-18093 |
Long Side Nozzle |
TF-CQ-8112 |
8" |
HDP |
|
|
| 0200-18095 |
COLLAR MIN CONTACT 200MM SNNF |
TF-CQ-8114 |
8" |
|
|
|
| 0200-18109 |
COLLAR 200MM SNNF SML FLT ULTI |
TF-CQ-8115 |
8" |
HDP |
|
|
| 0200-20055 |
Insulator |
TF-CQ-8116 |
8" |
Endura |
Preclean |
|
| 0200-20170 |
Cap coil support rigid |
TF-CQ-8117 |
8" |
Endura |
IMP |
|
| 0200-20175 |
Laybrinth, rigid coil support |
TF-CQ-8118 |
8" |
Endura |
IMP |
|
| 0200-20217 |
Laybrinth, Feedthru coil support vectra Imp |
TF-CQ-8119 |
8" |
Endura |
IMP |
|
| 0200-20246 |
Insulator |
TF-CQ-8120 |
8" |
|
Thin Film |
|
| 0200-20285 |
Pedestal Cover Upper |
TF-CQ-8121 |
8" |
Endura |
IMP |
|
| 0200-20315 |
Rest Button |
TF-CQ-8122 |
8" |
Endura |
IMP |
|
| 0200-20331 |
Cover Ring |
TF-CQ-8123 |
8" |
|
Thin Film |
|
| 0200-20426 |
Insulator Pinless |
TF-CQ-8124 |
8" |
Endura |
Preclean |
|
| 0200-21664 |
Isolator Ring |
TF-CQ-8125 |
8" |
|
Thin Film |
|
| 0200-26254 |
Ceramic Insulator |
TF-CQ-8126 |
8" |
Endura |
|
|
| 0200-35004 |
Blade Robot |
TF-CQ-8127 |
8" |
RTP |
|
|
| 0200-35145 |
RTP-Window |
TF-CQ-8128 |
8" |
|
RTP |
|
| 0200-35222 |
Window Lamp Housing ATM |
TF-CQ-8129 |
8" |
RTP |
|
|
| 0200-35265 |
RTP-Window |
TF-CQ-8130 |
8" |
|
RTP |
|
| 0200-35267 |
DOME, Ceramic DPS METAL |
TF-CQ-8131 |
8" |
DPS |
METAL |
|
| 0200-35290 |
Housing, Gas Feed, DPS MEC Chamber |
TF-CQ-8132 |
8" |
DPS |
METAL |
|
| 0200-35291 |
Plug, Inner, Gas Feed Assy |
TF-CQ-8133 |
8" |
DPS |
METAL |
|
| 0200-35292 |
Window Endpoint DPS MEC |
TF-CQ-8134 |
8" |
DPS |
All |
|
| 0200-35293 |
Window Manometer Port DPS MEC |
TF-CQ-8135 |
8" |
DPS |
All |
|
| 0200-35294 |
Quartz Lower Chamber VPRT DPS |
TF-CQ-8136 |
8" |
DPS |
All |
|
| 0200-35295 |
Housing, Gas Feed, DPS Poly |
|
8" |
DPS |
POLY |
|
| 0200-35296 |
Plug, Inner, Gas Feed Assy |
TF-CQ-8138 |
8" |
DPS |
POLY |
|
| 0200-35323 |
Ring, Capture 195mm SEMI NOTCH |
TF-CQ-8139 |
8" |
DPS |
METAL |
|
| 0200-35324 |
Ring, Single 195mm SEMI NOTCH |
TF-CQ-8140 |
8" |
DPS |
POLY |
|
| 0200-35326 |
Ring, Focus, 195mm SEMI NOTCH |
TF-CQ-8141 |
8" |
DPS |
METAL |
|
| 0200-35486 |
Wafer Lift Pin Chamber MODII |
TF-CQ-8142 |
8" |
RTP |
|
|
| 0200-35525 |
CERAMIC RESISTOR |
TF-CQ-8143 |
8" |
Endura |
|
|
| 0200-35573 |
Susceptor Support |
TF-CQ-8144 |
8" |
HTF |
|
|
| 0200-35596 |
Window Slit |
TF-CQ-8145 |
8" |
|
Thin Film |
|
| 0200-35611 |
Screw Lid Liner TxZ |
TF-CQ-8146 |
8" |
Endura |
TxZ |
|
| 0200-35783 |
Shadow Ring |
TF-CQ-8147 |
8" |
MxP |
|
|
| 0200-35801 |
Endpoint Window |
TF-CQ-8148 |
8" |
|
Etch |
|
| 0200-35828 |
Single Ring Ceramic |
TF-CQ-8149 |
8" |
DPS |
|
|
| 0200-35956 |
Dome, Ceramic, 2.75DIA Window DPS |
TF-CQ-8150 |
8" |
DPS |
POLY |
|
| 0200-35957 |
Window 2.75 DIA Sapphire DPS |
TF-CQ-8151 |
8" |
DPS |
METAL |
|
| 0200-36105 |
Chamber Insert |
TF-CQ-8152 |
8" |
|
Thin Film |
|
| 0200-36373 |
Producer Lift pin OD 0.149 |
TF-CQ-8153 |
8" |
Producer 300 |
producer |
|
| 0200-36415 |
C-Shaped Ceramic Ring |
TF-CQ-8154 |
8" |
DxZ |
SABP |
|
| 0200-36416 |
Pumping Ring (Two Rised Lands) |
TF-CQ-8155 |
8" |
DxZ |
SABP |
|
| 0200-36417 |
Pumping Ring (One Rised Lands) |
TF-CQ-8156 |
8" |
DxZ |
SABP |
|
| 0200-36418 |
Ceramic Cover |
TF-CQ-8157 |
8" |
DxZ |
SABP |
|
| 0200-36609 |
Isolator , Lid |
TF-CQ-8158 |
8" |
|
Thin Film |
|
| 0200-36630 |
Cover Plate |
TF-CQ-8159 |
8" |
DxZ |
all |
|
| 0200-36631 |
Cover Plate |
TF-CQ-8161 |
8" |
DxZ |
all |
|
| 0200-36666 |
Ceramic Isolator, Producer 200mm |
TF-CQ-8162 |
8" |
Producer |
|
|
| 0200-36680 |
Liner Upper |
TF-CQ-8163 |
8" |
|
Etch |
|
| 0200-36682 |
Liner Lower |
TF-CQ-8164 |
8" |
|
Etch |
|
| 0200-36685 |
Ring Single Ceramic |
TF-CQ-8165 |
8" |
|
|
|
| 0200-36696 |
Shadow Ring |
TF-CQ-8166 |
8" |
Super E |
|
|
| 0200-36697 |
Top Ring |
TF-CQ-8167 |
8" |
Super E |
|
|
| 0200-39135 |
Windo Manometer |
|
8" |
DPS |
|
|
| 0200-39137 |
Dome Ceramic DPS Chamber |
TF-CQ-8169 |
8" |
DPS |
POLY |
|
| 0200-39140 |
Ring, Focus, 195mm SEMI NOTCH |
TF-CQ-8170 |
8" |
DPS |
METAL |
|
| 0200-39152 |
Single Ring Ceramic |
TF-CQ-8171 |
8" |
DPS |
|
|
| 0200-39289 |
Isolator TEOS Pumping Ring |
TF-CQ-8172 |
8" |
Producer |
|
|
| 0200-39296 |
Aperture Ceramic Cover |
TF-CQ-8173 |
8" |
DPS |
|
|
| 0200-39297 |
Cover Ring |
TF-CQ-8174 |
8" |
MxP+ |
|
|
| 0200-39324 |
Chamber Insert Ceramic |
TF-CQ-8175 |
8" |
DxZ |
all |
|
| 0200-39361 |
Isolator Silane Pumping Ring |
TF-CQ-8176 |
8" |
Producer |
|
|
| 0200-40126 |
BLADE 6&8" THIN ROBOT W/O POCK |
TF-CQ-8177 |
8" |
HDP |
|
|
| 0200-40156 |
PIN LIFT CERAMIC LONG HDP |
TF-CQ-8178 |
8" |
HDP |
|
|
| AMAT |
|
|
|
|
|
| OEM P/N |
Description |
TF P/N |
wafer |
Chamber |
Process |
Material |
| 0200-01903 |
Insulator 300 mm |
TF-CQS-30100 |
12" |
Endura |
Preclean |
Quartz |
| 0020-29711 |
Shield , Lower |
TF-CQS-30101 |
12" |
|
|
|
| 0021-07586 |
Isolator Ring |
TF-CQS-30102 |
12" |
|
|
|
| 0021-07984 |
Shield , Outer |
TF-CQS-30103 |
12" |
|
|
|
| 0021-12063 |
Shield , One Piece |
TF-CQS-30104 |
12" |
|
|
|
| 0021-22177 |
Cover Ring |
TF-CQS-30105 |
12" |
|
|
|
| 0021-22224 |
Pedestal |
TF-CQS-30106 |
12" |
|
|
|
| 0040-04586 |
Shield , Inner |
TF-CQS-30107 |
12" |
|
|
|
| 0040-07291 |
Deposition Ring |
TF-CQS-30108 |
12" |
|
|
|
| 0040-13509 |
Bell jar 300 mm |
TF-CQS-30109 |
12" |
Endura |
Preclean |
|
| 0040-55456 |
300mm Bell jar |
TF-CQS-30110 |
12" |
Endura |
Preclean |
|
| 0190-21447 |
Top , Cover |
TF-CQS-30111 |
12" |
|
|
|
| 0200-00464 |
Ceramic life ring |
TF-CQS-30112 |
12" |
Producer 300 |
|
|
| 0200-00511 |
HDP 12" COVER RING |
TF-CQS-30113 |
12" |
HDP |
|
|
| 0200-00518 |
Pumping ring |
TF-CQS-30114 |
12" |
Producer 300 |
|
|
| 0200-00666 |
TOP ceramic liner |
TF-CQS-30115 |
12" |
Producer 300 |
|
|
| 0200-00667 |
Middle ceramic liner |
TF-CQS-30116 |
12" |
Producer 300 |
Thin Film |
Ceramic |
| 0200-00668 |
Botton Ceramic Liner |
TF-CQS-30117 |
12" |
Producer 300 |
Thin Film |
Ceramic |
| 0200-00828 |
Top ring |
TF-CQS-30118 |
12" |
Emax |
|
|
| 0200-01233 |
Insert Ring |
TF-CQS-30119 |
12" |
Emax |
Etch |
Silicone |
| 0200-01284 |
Bottom shadow Ring |
TF-CQS-30120 |
12" |
Emax |
Etch |
Quartz |
| 0200-01326 |
Insulator Ring |
TF-CQS-30121 |
12" |
Endura |
Thin Film |
Ceramic |
| 0200-01610 |
Gas Injector , 15Holes |
TF-CQS-30122 |
12" |
Emax |
Etch |
Quartz |
| 0200-01611 |
Gas Injector , 12Holes |
TF-CQS-30123 |
12" |
Emax |
Etch |
Quartz |
| 0200-01623 |
RTP-Window |
TF-CQS-30124 |
12" |
|
RTP |
Quartz |
| 0200-01863 |
Cover Ring |
TF-CQS-30125 |
12" |
HDP |
Thin Film |
Ceramic |
| 0200-02302 |
Insert Ring |
TF-CQS-30126 |
12" |
Emax |
Etch |
Quartz |
| 0200-02421 |
Isolator , TxZ |
TF-CQS-30127 |
12" |
|
Thin Film |
Ceramic |
| 0200-00981 |
SINGLE RING |
TF-CQS-30128 |
12" |
|
|
Quartz |
| 0200-02925 |
QUARTZ INSULATOR PIPE |
TF-CQS-30129 |
12" |
|
|
Quartz |
| 0200-04220 |
QTZ OUTER RING |
TF-CQS-30130 |
12" |
|
Etch |
Quartz |
| 0200-36034 |
INSULATOR PIPE |
TF-CQS-30131 |
12" |
|
|
Quartz |
| 0200-02868 |
LOWER GDP |
TF-CQS-30132 |
12" |
|
|
Quartz |
| 0200-02923 |
TOP RING |
TF-CQS-30133 |
12" |
|
|
Quartz |
| 0200-01118 |
RECESSED TOP WINDOW EMAX |
TF-CQS-30134 |
12" |
|
|
Quartz |
| 0200-02927 |
INSERT RING |
TF-CQS-30135 |
12" |
|
|
Si |
| 0200-03559 |
Si TOP RING |
TF-CQS-30136 |
12" |
|
Etch |
Silicone |
| 0200-03555 |
Si INSERT RING |
TF-CQS-30137 |
12" |
|
Etch |
Silicone |
| 0200-00531 |
Pump Plate |
TF-CQS-30138 |
12" |
|
Thin Film |
Ceramic |
| 0200-00772 |
Ring , Outer |
TF-CQS-30139 |
12" |
|
Thin Film |
Ceramic |
| 0200-00829 |
Insert Ring |
TF-CQS-30140 |
12" |
|
Etch |
Silicone |
| 0200-01195 |
Window , DPS 2 |
TF-CQS-30141 |
12" |
|
Etch |
Quartz |
| 0200-01321 |
Shadow Ring |
TF-CQS-30142 |
12" |
|
Etch |
Quartz |
| 0200-01347 |
Dome |
TF-CQS-30143 |
12" |
|
Etch |
Ceramic |
| 0200-01612 |
Gas Injector , 27Holes |
TF-CQS-30144 |
12" |
|
Etch |
Quartz |
| 0200-01797 |
Insert Ring |
TF-CQS-30145 |
12" |
|
Etch |
Silicone |
| 0200-01991 |
Ring , Finger Lift |
TF-CQS-30146 |
12" |
|
Thin Film |
Ceramic |
| 0200-02114 |
Housing |
TF-CQS-30147 |
12" |
|
Thin Film |
Ceramic |
| 0200-02181 |
Deposition Ring |
TF-CQS-30148 |
12" |
|
Thin Film |
Ceramic |
| 0200-02228 |
Shadow Ring |
TF-CQS-30149 |
12" |
|
Etch |
Quartz |
| 0200-02301 |
Top Ring |
TF-CQS-30150 |
12" |
|
Etch |
Quartz |
| 0200-02395 |
Liner, Top Producer se |
TF-CQS-30151 |
12" |
|
Thin Film |
Ceramic |
| 0200-02396 |
Liner, Middle Producer se |
TF-CQS-30152 |
12" |
|
Thin Film |
Ceramic |
| 0200-02397 |
Liner, Bottom Producer se |
TF-CQS-30153 |
12" |
|
Thin Film |
Ceramic |
| 0200-02407 |
Pumping Ring Side 1 |
TF-CQS-30154 |
12" |
 |
Thin Film |
Ceramic |
| 0200-02408 |
Pumping Ring Side 2 |
TF-CQS-30155 |
12" |
|
Thin Film |
Ceramic |
| 0200-02414 |
Liner, Top Eterna |
TF-CQS-30156 |
12" |
|
Thin Film |
Ceramic |
| 0200-02525 |
Liner, Middle Producer |
TF-CQS-30157 |
12" |
|
Thin Film |
Ceramic |
| 0200-02626 |
Top Ring |
TF-CQS-30158 |
12" |
|
Etch |
Quartz |
| 0200-02916 |
Deposition Ring |
TF-CQS-30159 |
12" |
|
Thin Film |
Ceramic |
| 0200-03312 |
Hoop Lift Ring |
TF-CQS-30160 |
12" |
|
Thin Film |
Ceramic |
| 0200-03313 |
Floating Ring |
TF-CQS-30161 |
12" |
|
Thin Film |
Ceramic |
| 0200-03443 |
Single Ring Hart + |
TF-CQS-30162 |
12" |
|
Etch |
Quartz |
| 0200-03574 |
Base Ring |
TF-CQS-30163 |
12" |
|
Etch |
Quartz |
| 0200-36399 |
Shield , Top |
TF-CQS-30164 |
12" |
|
Thin Film |
Ceramic |
| 0200-03736 |
Collar Ring |
TF-CQS-30165 |
12" |
|
Etch |
Silicone |
| 0200-03969 |
Top Liner |
TF-CQS-30166 |
12" |
|
Thin Film |
Ceramic |
| 0200-04030 |
View Port , Bottom |
TF-CQS-30167 |
12" |
|
Etch |
Quartz |
| 0200-04031 |
View Port , Top |
TF-CQS-30168 |
12" |
|
Etch |
Quartz |
| 0200-04273 |
Insert Ring |
TF-CQS-30169 |
12" |
|
Etch |
Silicone |
| 0200-05032 |
Insert Ring |
TF-CQS-30170 |
12" |
|
Etch |
Silicone |
| 0200-05106 |
Outer Combo Ring |
TF-CQS-30171 |
12" |
|
Etch |
Quartz |
| 0200-76050 |
Cover , Pedestal |
TF-CQS-30172 |
12" |
|
Thin Film |
Ceramic |
| 0200-76057 |
Ring , Cover |
TF-CQS-30173 |
12" |
|
Thin Film |
Ceramic |